The water contact angle (WCA) of nanocrystalline TiO2 films was adjusted by fluoroalkylsilane (FAS) modification and photocatalytic lithography. FAS modification made the surface hydrophobic with the WCA up to similar to 156 degrees, while ultraviolet (UV) irradiation changed surface to hydrophilic with the WCA down to similar to 0 degrees. Both the hydrophobicity and hydrophilicity were enhanced by surface roughness. The wettability can be tailored by varying the concentration of FAS solution and soaking time, as well as the UV light intensity and irradiation time. Additionally, with the help of photomasks, hydrophobic-hydrophilic micropatterns can be fabricated and manifested via area-selective deposition of polystyrene particles. (C) 2011 Elsevier B. V. All rights reserved.