In the present study, a poly(vinylidene fluoride) (PVDF)/TiO2 nano-composite film was prepared by coating a substrate with an acetone/DMF solution, which was then evaporated at a temperature of 110 degrees C. Micro-structure patterns were fabricated on a PVDF/TiO2 nano-composite film with photocatalytic lithography. The morphological and chemical compositions of the micro-structure were investigated by optical microscope, SEM and XPS. Experimental results show that the micro-structure patterns can be directly replicated on the PVDF/TiO2 nano-composite film with photocatalytic lithography. The micro-structure is approximately 4 mu m in depth which is obtained during the water phase of the process with UV-LED irradiation in 5 h. The results indicate that the fabrication methodology can be potentially applied towards the large-scale fabrication of actuators and sensor devices. (C) 2012 Elsevier B. V. All rights reserved.