Previous Article Next Article Table of Contents Chemical Reviews, Vol.112, No.4, 2434-2453, 2012 DOI10.1021/cr200257z Export Citation Chloride-Based CVD Growth of Silicon Carbide for Electronic Applications Pedersen H, Leone S, Kordina O, Henry A, Nishizawa S, Koshka Y, Janzen E Please enable JavaScript to view the comments powered by Disqus.