This study examined the crystal structure and surface morphology, including the Ti segregation mechanism on the Surface due to the inter-diffusion between Pt, Ti and TiOx as a glue layer, according to the annealing temperature and growth orientation of a Pt film. In addition. the fatigue mechanism of ferroelectric PZT thin films deposited on a Pt-based electrode was also investigated. The nano-structure. orientation mapping. and micro-morphologies of the triangular Pt hillocks were investigated by scanning electron microscopy with an electron backscatter diffraction (EBSD) function. The D-E hysteresis loop of the ferroelectric films was measured using a Sawyer-Tower circuit at 1 kHz to obtain the remanent polarization and coercive field. (C) 2008 Elsevier B.V. All rights reserved.