We report a simple and cost effective method to fabricate regular metallic particle arrays over large areas with good regularity by using holographic lithography interference for the study of localized surface plasmon. Samples of disk-shaped gold nano-particles arranged in square arrays with lattice spacing ranging from 300 nm to 600 nm were successfully fabricated on glass substrates first by sputtering a thin gold layer onto two-dimensional photoresist templates of hole arrays in square lattice obtained by the holographic method and then removing the photoresist by a lift-off procedure. The plasmonic resonance of the gold nano-particle arrays due to the change of morphology by thermal annealing was studied. The disk-shaped gold nano-particles were found to become more round shaped upon heating the blue shift of the extinction plasmonic band was observed. The results were explained with model calculations using spheroidal particles. (c) 2008 Elsevier B.V. All rights reserved.