Titania based ceramics are promising materials for environmental sensors, high efficiency photocatalyst. Ion doping is an effective method to improve the properties by modifying their microstructure and phase composition. In this study, TiO2 particles doped with Fe3+ were prepared by sol-gel method using Ferric nitrate and tetrabutyl titanate as precursors. Fe3+ was incorporated in the TiO2 matrix during thermal treatment in different temperatures. Thermal analysis, TEM and X-ray diffraction were used to characterize the TiO2 powder. Microstructure, phase content, and cell parameters were calculated according to Rietveld refinement software GSAS. The interaction mechanism of Fe3+ in crystal lattice of titanium dioxide and the crystal growth kinetics of Fe3+-doped TiO2 are discussed. (C) 2010 Elsevier B.V. All rights reserved.