Plasma treatment of silicone surfaces is a useful way of increasing wettability to improve adhesion and a first step in producing various organosilicon thin-film composites. Despite numerous earlier studies, there is no consensus on the effect of plasma treatment nor on the mechanism of the subsequent hydrophobic recovery. X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) were used to study the effect of plasma treatments of polydimethylsiloxane elastomer using four different plasma gases: argon, helium, oxygen, and nitrogen. In each case, the surface was oxidized to produce a thin, wettable, brittle silica-like layer. These surfaces progressively recover their hydrophobicity by diffusion of untreated polymer chains through cracks in the treated layer. Angle-resolved XPS detected the untreated, diffused layer and SEM revealed the common occurrence of cracks in the treated layer, although conditions could be found for each gas where the surface becomes completely wettable by water but is free from cracks.