Oxidation is the most common surface modification of polymers. This paper presents a comparison of five gas-phase surface oxidation processes: corona discharge, flame, remote air plasma, ozone, and combined UV/ozone treatments. Well-characterized biaxially oriented films of polypropylene and poly(ethylene terephthalate) were treated by each of the five techniques. The surface-treated films were then analyzed by X-ray photoelectron spectroscopy (XPS or ESCA), contact-angle measurements, and Fourier-transform IR (FTIR) spectroscopy. Corona, flame, and remote-plasma processes rapidly oxidize polymer surfaces, attaining XPS O/C atomic ratios on polypropylene of greater than 0.10 in less than 0.5 s. In contrast, the various UV/ozone treatments require orders of magnitude greater exposure time to reach the same levels of surface oxidation. While corona treatment and flame treatment are well known as efficient means of oxidizing polymer surfaces, the ability of plasma treatments to rapidly oxidize polymers is not as widely appreciated. Of the treatments studied, flame treatment appears to be the ＇shallowest＇; that is, the oxygen incorporated by the treatment is most concentrated near the outer surface of the film. Corona and plasma treatments appear to penetrate somewhat deeper into the polymers. At the other extreme, the UV/ozone treatments reach farther into the bulk of the polymers.