Plasma treatment changes the solvent absorption and permeation as well as the swelling properties of polymers. Enchanced solvent absorption and swelling are effects of an improved solvent compatibility. The plasma introduces a large number of different groups at the polymer surface depending on the nature of the plasma. Fluorine-containing plasmas can replace hydrogen atoms of the polymer molecule with fluorine atoms. Moreover, fluorine-containing plasma polymer layers can be formed. All these processes reduce the resulting surface free energy, reduce the diffusion length of solvent molecules, and produce a barrier layer. We have studied the formation of solvent barriers by plasma fluorination and by crosslinking by ultraviolet (UV) radiation. Thin foils of polypropylene (PP) and polyethyleneterephthalate (PET) were used as substrates. CF4, SF6, and SOF2 were applied as sources of fluorine atoms. Hexafluoropropene, tetrafluorethylene, and perfluorohexylethylene form plasma polymer layers on the polymer substrates. Test solvents were n-pentane, tetrachloroethylene, dimethylsulfoxide, and mixtures of n-pentane and methanol. The permeation rate of solvents through plasma-modified polymers was measured gravimetrically. Mass spectrometry was applied to analyze the permeating components of the solvent mixtures. Fluorination of surface layers by plasma-chemical (CF4, SF6) means considerably reduces the permeation rate of PP (95% barrier effect) and PET (100%). The preferred permeation of one component of the pentane/methanol mixture is influenced by the polarity of plasma-introduced groups at the polymer surface.