Journal of Vacuum Science & Technology A
| Country | United States |
|---|---|
| Language | English |
| ISSN (Print) | 0734-2101 |
| Full-name | Journal of Vacuum Science & Technology A |
| Abbr. Name | J. Vac. Sci. Technol. A |
| Since | 1983 |
| Publisher | American Institute of Physics |
| Publisher Home | http://www.aip.org/ |