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Characteristics of ZnO thin film Deposited by Atomic Layer Deposition Method Jae-Sung Hur, Chang-Sik Son, Jeong-Seop Lee, Byoung-Hoon Lee, Jung-Bin Song, Dong Gun Lee, Sam Seok Jang, Dongjin Byun, Jong-Hyeob Baek, In-Hoon Choi 한국재료학회 2006년 봄 학술대회 |
1 |
Hydrogen effect of ZnO:Al by RF magnetron sputtering in H2/Ar atmosphere Jeong-Seop Lee, Chang-Sik Son, Jae-Sung Hur, Byoung-Hoon Lee, Jung-Bin Song, Jong-Hyeob Baek, In-Hoon Choi 한국재료학회 2006년 봄 학술대회 |