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Structural and Electrical characteristics of Low-k Silicon Oxycarbide thin film deposited via Remote Plasma Atomic Layer Deposition Yurim Kwon, Chanwon Jung, Jongwoo Kim, Suhyeon Park, Byunguk Kim, Seokhwi Song, Hyeongtag Jeon 한국재료학회 2019년 봄 학술대회 |
1 |
Optical and thermal properties of SiO2-Al2O3-CuO glass for application in laser sealing Jungki Lee, Jongwoo Kim, Dongsun Kim, Hyungsun Kim 한국재료학회 2011년 가을 학술대회 |