| 번호 | 제목 |
|---|---|
| 1 |
Reduction of Large Particles and Light Point Defects (LPD) by Aging and Selective Sedimentation Process in Ceria Slurry for Shallow Trench Isolation Chemical Mechanical Polishing Byong-Seog Lee, Hyun-Goo Kang, Kyung-Woong Park, Ungyu Paik, Jea-Gun Park 한국재료학회 2006년 봄 학술대회 |
