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2 |
Area-Selective Atomic Layer Deposition Assisted by Short-Chain Alkanethiols Self-Assembled Monolayers Jeongbin Lee, Jinseon Lee, Jeong-Min Lee, Tae Joo Park, Woohee Kim 한국재료학회 2020년 봄 학술대회 |
1 |
Enhanced Selectivity of Atomic Layer Deposited Ru Thin Films through the Discrete Feeding of Vapor-Phase Inhibitor Jeong-Min Lee, Ji Won Han, Tae Joo Park, Woo-Hee Kim 한국재료학회 2020년 봄 학술대회 |