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2 Area-Selective Atomic Layer Deposition Assisted by Short-Chain Alkanethiols Self-Assembled Monolayers
Jeongbin Lee, Jinseon Lee, Jeong-Min Lee, Tae Joo Park, Woohee Kim
한국재료학회 2020년 봄 학술대회
1 Enhanced Selectivity of Atomic Layer Deposited Ru Thin Films through the Discrete Feeding of Vapor-Phase Inhibitor
Jeong-Min Lee, Ji Won Han, Tae Joo Park, Woo-Hee Kim
한국재료학회 2020년 봄 학술대회