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Thermoelectric Characteristics of Si/Silicide-Heterostructure Layers Fabricated by RF Magnetron Sputtering Ji Hwa Lee, Jae Kwon Ha, Chongsei Yoon, Giwan Yoon 한국재료학회 2017년 가을 학술대회 |
1 |
Characterization of Tungsten Silicide Films Fabricated by RF Magnetron Sputtering and RTA Techniques Jae Kwon Ha, Ji Hwa Lee, Buil Jeon, Giwan Yoon 한국재료학회 2017년 가을 학술대회 |