| 번호 | 제목 |
|---|---|
| 2 |
Effects of Surfactant Molecular weight and Concentration in Nano-Ceria Slurry on Nanotopography Impact in Chemical Mechanical Polishing Hyuk-Yul CHOI, Hyun-Goo KANG, Jun-Seok KIM, Ungyu PAIK, Jea-Gun PARK 한국재료학회 2006년 가을 학술대회 |
| 1 |
Effects of Non-Prestonian Behavior of Ceria Slurry with Anionic Surfactant on Abrasive Concentration and Size in Shallow Trench Isolation Chemical Mechanical Polishing Hyuk-Yul CHOI, Hyun-Goo KANG, Jun-Seok KIM, Ungyu PAIK, Jea-Gun PARK 한국재료학회 2006년 봄 학술대회 |
