| 번호 | 제목 |
|---|---|
| 3 |
Effects of Organic Additives in Ceria Slurry on Enhanced Oxide-to-Nitride Removal Selectivity in Shallow Trench Isolation Chemical Mechanical Polishing Byeong-Seog LEE, Hyun-Goo KANG, Kyung-Woong PARK, Ungyu PAIK, Jea-Gun PARK 한국재료학회 2006년 가을 학술대회 |
| 2 |
Effects of Amorphous-silicon and Poly-silicon films on Within-Wafer Non-Uniformity (WIWNU) Improvement in Chemical Mechanical Polishing. Yoon-Kweon Choi, Jae-Il Choi, Kyung-Woong PARK, Ungyu PAIK, Jea-Gun PARK 한국재료학회 2006년 봄 학술대회 |
| 1 |
Reduction of Large Particles and Light Point Defects (LPD) by Aging and Selective Sedimentation Process in Ceria Slurry for Shallow Trench Isolation Chemical Mechanical Polishing Byong-Seog Lee, Hyun-Goo Kang, Kyung-Woong Park, Ungyu Paik, Jea-Gun Park 한국재료학회 2006년 봄 학술대회 |
