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THE ROLE OF SURFACE FUNCTIONAL GROUPS OF SiOC:H LOW-K FILMS ON THE NUCLEATION OF ATOMIC-LAYER-DEPOSITED RUTHENIUM Jaeyeong Heo, Seok-Jun Won, Sanghyun Park, Cheol Seong Hwang, Hyeong Joon Kim 한국재료학회 2008년 가을 학술대회 |