| 초록 |
High density arrays of conducting polymer nanodots and gold nanorods are fabricated by an electrochemical polymerization and deposition with a dually responsive nanoporous template. Templates are prepared by self-assembly of silicon-containing block copolymers and a lithographic bilayer system. We introduced a dually responsive photoresist bottom layer into which the nanopatterns of block copolymer are transferred by oxygen reactive ion etching. Because the dually responsive layer becomes cross-linked by heating, it can be used as a hard template during the etching process. It becomes soluble again by chain scission upon exposure to light. Therefore, it can be easily removed by the lift-off process. Then, high density arrays of polypyrrole nanodots and gold nanorods are successfully obtained. |
