| 초록 |
The ZnO is one of the important layer within multilayered solar cell devices, which have the significant impact on the power conversion efficiency (PCE). In this work, ZnO thin films were prepared on soda lime glass substrates using RF magnetron sputtering system. The RF power was varied and the effect of RF power on the properties of ZnO thin films were analyzed. The RF power was varied from 30W to 100W in the interval of 10W under similar deposition conditions (time- 1800s and working pressure of 1mTorr). Since, the thickness of the thin films varies depending on the RF power, which also shows the different optoelectronic properties. Particularly, optical characteristics have shown significant change in the transmittance, along with change in the band gap. The thin film deposited at 30W showed higher visible transmittance of 95%, whereas, the thin film deposited at 100W showed slightly lower transmittance of 88%. The solar cell fabricated with i-ZnO thin film deposited at 30W showed PCE of 10.21%. |
