| 학회 |
한국고분자학회 |
| 학술대회 |
2012년 봄 (04/12 ~ 04/13, 대전컨벤션센터) |
| 권호 |
37권 1호 |
| 발표분야 |
대학원생 구두발표(영어발표) |
| 제목 |
Fabrication of the Block Copolymer Patterns via Combining Graphoepitaxy and Surface Guidance |
| 초록 |
One of the key issues for the block copolymer patterning is controlling the pattern array. Using directed assembly of block copolymer on the chemically patterned surfaces guarantee highly uniform array or controlled non-regular array. In this system, the chemically patterned surface can induce well resisted array over arbitrary large areas. Alternatively, another method is the graphoepitaxy. In this case, the self-assembly of block copolymer is guided by the topographical wall of lithographically pre-patterned substrates. In this work, we demonstrate a new type of fabrication method to achieve highly controlled and uniform patterns. Our approach is to combine the graphoepitaxy method and hexagonally surface guiding patterns from crosslinkable block copolymers. When the lamellar forming block copolymers were prepared on hexagonal patterns, a highly aligned stripe was obtained and the alignment was significantly improved comparing to the case when no hexagonal surface patterns were used. |
| 저자 |
정현중1, 이수미2, 곽은애2, 우상훈1, Frank A. Leibfarth3, Craig J. Hwaker3, 허준4, 류두열4, 방준하1
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| 소속 |
1고려대, 2삼성전자, 3UCSB, 4연세대 |
| 키워드 |
block copolymer; cross-linkable; graphoepitaxy; surface guidance
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| E-Mail |
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