화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2010년 가을 (10/07 ~ 10/08, 대구 EXCO)
권호 35권 2호
발표분야 기능성 고분자
제목 Dually Patterned Self-assembled Monolayer via Si-containing Block Copolymer Lithography on Gold Substrate
초록 Chemical surface nanostructures were obtained using self-assembled monolayer patterned by microcontact printing or nanoimprint technique. But these approaches are inadequate at the micron- and sub-micron scales. Serial techniques like dip-pen and electron-beam lithographies achieve nanoscale patterns but are limited to define large area patterns. In this study, we use Si-containing block copolymer lithography for fabricating highly ordered nanoporous SiO2 structures on gold substrates. The materials with silanol end groups self-assembled on the SiO2 surface, while the compounds with the thiol groups on the gold surface. This dually patterned self-assembly method not only form ordered nanostructures over large area, but also offer dense periodic arrays of inorganic oxide.
저자 우승아, 최수영, 구세진, 김수민, 김진백
소속 한국과학기술원
키워드 self-assembly monolayer; block copolymer lithography
E-Mail