| 초록 |
Novolac is one of the promising carbon precursors due to its low cost, high temperature resistance, and high carbon yield. In this study, carbon films and micropatterns were prepared from novolac by proton irradiation and carbonization. For this, novolac thin films spin-coated on a substrate were irradiated with proton ion beams at fluences ranging from 1 x 1014 to 1 x 1016 ions/cm2. In order to make novolac micropatterns, the novolac films were irradiated through a patterns mask and then developed with a conventional TMAH developer. The prepared novolac thin films and micropatterns were carbonized under inert atmosphere at 1000 oC. The final carbon thin films and micropatterns were characterized in terms of their chemical compositions, morphology, thermal stability, and electrical properties. |
