초록 |
Reactive polyimides (DOCDA-6FHAB and 6FDA-6FHAB) containing hydroxyl functionalities were prepared with a simple one step condensation polymerization from the reaction of 5-(2,5-dioxytetrahydrofuryl)3-methly-3-cylohexene-1-2-dicarboxylic anhydride (DOCDA), 5,5'-(perfluoropropane-2,2-diyl)diisobenzofuran-1,3-dione (6FDA), and 5,5'-(perfluoro propane-2,2-diyl)bis(2-aminophenol) (6FHAB). Synthesized polyimides were further reacted with trimethylolpropane triglycidyl ether as cross-linking agent. Thin film properties of novel polyimide-epoxy composites were systematically characterized such as chemical structures, surface roughness, surface energy, thermal stability, and capacitance, etc. Crosslinked DOCDA-6FHAB and 6FDA-6FHAB thin films showed good surface roughness as root mean square (rms) value as about 0.568 and 0.357 nm in AFM measurement. In addition, both crosslinked polyimide films showed extremely low leakage current densities in metal-insulator-metal (MIM) devices. |