| 초록 |
Recently, studies for manufacturing synthetic graphite using petroleum pitches and various carbon intermediate materials having low coat have been actively carried out. Hence, The importance of accurate analysis of material is also increasing. However, The petroleum pitch and carbon imtermediate materials are difficult to analyze accurately because the structure is destroyed or the shape changes due to the electron beam depending on the deterioration characteristics of the polymer when analyzing the surface of the specimen. Metal coatings can reduce damage and charge up, but image distortion can occur. Deceleration technology of scanning electron microscope can analyze high resolution image at low acceleration voltage without coating and can reduce electron beam damage and charge up phenomenon. In this study, We analyzed various carbon imtermediate materials using deceleration technique. |
