| 학회 |
한국재료학회 |
| 학술대회 |
2007년 봄 (05/10 ~ 05/11, 무주리조트) |
| 권호 |
13권 1호 |
| 발표분야 |
전자재료 |
| 제목 |
Structural and electrical properties of polycrystalline ZnO and Ga-doped ZnO thin films grown by RF magnetron sputtering |
| 초록 |
One of the possible applications of the ZnO is in a new generation of electronic devices. We investigate structural and electronic properties of polycrystalline ZnO and Ga doped ZnO(GZO) film grown on the glass substrate by RF magnetron sputter at room temperature. The structural properties of both ZnO and GZO thin films are analyzed by x-ray diffraction(XRD), transmission electron microscopy(TEM) and field-emission scanning electron microscopy(FE-SEM). The hall effect measurement is conducted to find the electrical properties of the thin films. It is found that the GZO films show the better crystalline than that of ZnO thin films based on the results of both TEM and XRD measurements. It is also found that the electrical conductivity of GZO films is higher than that of ZnO thin films. |
| 저자 |
김금채1, 황숙현2, 전훈하1, 박치영2, 김재규1, 황보수정2, 이수경1, 이지수2, 김도현1, 임재영2, 전민현1, Wonbong Choi2, Ved Prakash Verma1
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| 소속 |
1인제대, 2center for nano manufacturing |
| 키워드 |
Ga-doped; magnetron sputtering; crystallinity; conductivity; electronic devices
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| E-Mail |
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