| 초록 |
Self-aligned microlenses and pinholes array plays key role to enhance the performance of many in consumer products, such as confocal microscopy, 3D screen system. This paper describes a effective method for fabrication of self-aligned microlenses and pinholes array using a novel method developed in this work. To avoid problems produced by misalignment between a microlens array and pinhole array, maskless lithography has been suggested and tested. Silicon master of micro-cylinder array is prepared using photolithography and the film(PC, polycarbonate) is used to fabricate self-aligned microlenses and pinholes array. The structure and performance of self-aligned array of microlenses and pinholes have been evaluated and demonstrated . |
