| 초록 |
Ultrasensitive nanoscale crack based mechanosensor inspired by spider’s sensory organ was presented. The sensor is sensitive (GF ~ 2,000 at 2%) to strain and vibration with the ability to detect amplitude of approximately 10 nm scale with simple fabrication. However, geometric effects in nanoscale cracks for the sensitivity was not clearly presented. In this presentation, crack depth is considered as a key factor to improve sensor's performance. Therefore we improved the nanoscale crack based sensor by controlling geometric crack depth, and obtained highly enhanced sensitivity with the gage factor of approximately 16,000 at 0-2% of strain. Crack depth was successfully controlled, not affecting the other crack’s geometry using propagation forces. Theoretical modeling well agreed with the experimental data. We also demonstrated a wearable sensor applicable to detect an acoustic signal, even a weak acoustic signal, with high enough signal to noise ratio (SNR). Such a high sensitive sensor can detect the desired signal compared to low sensitivity sensors, and have the potential for speech recognition system. |
