| 초록 |
A transparent gas barrier layer consisting of inorganic/organic stacks was deposited on a polymer substrate by sputtering and wet-coating. Details of radio-frequency power effects on the SiOx and SiNx inorganic layer properties in terms of evaporation rate, refractive index, internal stress and water vapor transmission rate(WVTR) were investigated. It was found that the gas barrier property, flexibility, and optical property of the SiOx/SiNx barrier films can be tailored by varying the layer thickness. We calculated reflectivity spectrum for the given range of wavelengths using layer thicknesses and dispersion data of refractive indices for the defined stack of inorganic materials. The simulated reflectivity spectra for various combinations of materials in multilayer stacks are presented and compared with the experimental results of the multilayer film. The performance of the inorganic/organic barrier stacks presented has high potential for future flexible electronics applications. |
