| 초록 |
Zr–Si–N coatings with various Si contents were synthesized by a hybrid coating system combining arc ion plating and d.c. magnetron sputtering techniques. The influence of the Si content on the microstructure, mechanical properties and tribological properties of the Zr–Si–N coatings were investigated. The results showed that as the Si content increase from 0 to 5.8 at.%, the coatings transformed from crystalline ZrN to nanocomposite structure with ZrN crystallites embedded in amorphous Si3N4 matrix and further increase of Si content lead to amorphous coatings. The maximum hardness (H) of 33 GPa, Young’s modulus (E) of 265 GPa, and H/E* value of 0.12 were obtained at Si content of 5.8 at.% in the Zr–Si–N coatings, respectively. The coating with the lowest friction coefficient and the best wear resistance was also obtained at Si content of 5.8 at.%, which was mainly contributed to high value of H/E* and formation of SiO2 or Si(OH)4 self-lubricating layer due to the interface tribochemical reaction. |
