| 초록 |
Due to its high mass sensitivity (ng/cm2), nongravimetric quartz crystal microbalance (QCM), has garnered attention with its ability to monitor mass loading in both liquid and gas environment. The resonant frequency shift in QCM device can quantitatively be correlated with addition/removal of mass onto the surface of solid sensitization layer. Yet, the additional factors affecting its frequency shift can be temperature, pressure and roughness of the surface, which has rather been neglected due to lack of theoretical approaches. To solely probe mass loading and confirm the accuracy of gas sorption measurement in QCM device, a parametric study was conducted in custom-made QCM setup. Single component sorption of H2, He, and N2 in 300 nm platinum, were measured at temperature ranging from 35~85 oC and pressure ranging from 1~5 bars. Furthermore, the precision of following apparatus has been validated. |
