| 초록 |
In this study, we have demonstrated a novel organic-inorganic hybrid gate dielectric material, zirconium tetraacrylate (ZrTA). ZrTA gate dielectric, where inorganic Zr elements are embedded in organic acrylate matrix, takes advantage of the complementary properties of single organic or inorganic gate dielectrics. A simple spin-coating and UV-assisted crosslinking reaction of acrylate moieties allowed ZrTA film to be photo-patterned. The crosslinked ZrTA film by UV and heat treatments (UV: 365 nm for 3 min and heat: 120 °C for 30 min) showed high dielectric strength (10-7 A/cm2 at 2 MV/cm), and dielectric constant (5.48), which is higher than those of conventional polymer materials. Organic thin-film transistor composed of a pentacene semiconductor and a crosslinked ZrTA gate dielectric displayed a moderately high field-effect mobility of 0.50 cm2/(V∙s) with a negligible hysteresis transfer characteristic. |
