| 학회 | 한국재료학회 |
| 학술대회 | 2014년 가을 (11/27 ~ 11/28, 대전컨벤션센터) |
| 권호 | 20권 2호 |
| 발표분야 | A. 전자/반도체 재료(Electronic and Semiconductor Materials) |
| 제목 | Controlling Structural and Electrical Properties by Dispersing Pt Nanoparticle into SiO2 Thin Film |
| 초록 | Nanocomposite thin film can be formed by an insulation oxide matrix with under micro-meter-sized metal particles being uniformly dispersed. It can control optical, electromagnetic, thermal, thermoelectric, and mechanical properties. Recently, it is of great interest to apply to nanoelectronics is ongoing by using the oxide film of dispersed 1-10nm size metallic particles like Au, Ni, Pt, Ir, Co or semi-conductor material like Si, Ge. CTF (Charge trap flash) memory and ReRAM (resistance random access memory) can be representative examples. In this study, co-sputtering was used to control the content and size of the nanoparticle. This study is trying to figure out the relationship between the microstructure of composite thin material and its own electrical properties. Pt nanoparticle-dispersed SiO2 (SOP) films were prepared by RF co-sputtering method using Pt and SiO2 targets in Ar atmosphere. The growth rate and Pt content in the film were controlled by means of manipulating the RF power of Pt target while that of SiO2 was fixed. The roughness of the film was increased with increasing the power of Pt target, which was mainly due to the increment of the size and planar density of Pt nanoparticle. It was revealed that SOP film formed at 10, 15, 20 W of Pt power contained 2.3, 2.7, and 3.0 nm of spherical Pt nanopowder, respectively. Electrical conductivity of SOP films was exponentially increased with increasing Pt power as one can expect. Interestingly, conductivity of SOP films from Hall effect measurement was greater than that from DC I-V measurement, which was explained by the significant increase of electron density. |
| 저자 | 이재호, 신인주, 이성우, 김형철, 최병준 |
| 소속 | 서울과학기술대 |
| 키워드 | metal dispersed insulating film; metal-insulator composite; co-sputtering; electron density; and electrical conductivity |
