| 학회 |
한국재료학회 |
| 학술대회 |
2010년 봄 (05/13 ~ 05/14, 삼척 팰리스 호텔) |
| 권호 |
16권 1호 |
| 발표분야 |
G. Display (LCD, PDP, OLED) Materials(디스플레이 재료) |
| 제목 |
The structural , optical and electrical properties of TiON/Au/TiON multilayer films |
| 초록 |
Sandwich structures of TiON/Au/TiON (TAT) films were deposited on glass substrates via RF magnetron sputtering of TiON and DC magnetron sputtering of Au. The optical and electronic properties of the films were strongly influenced by the Au interlayer. The Au insert caused a deteriorated optical transmittance, while electrical conductivity was improved with an increased carrier density. The intermediate Au film was crystallized in TAT films, but this may not have affected the crystallinity of the TiON films. In this study, new transparent and conducting TAT films with a sheet resistance of 29 Ω/□ and 78% of optical transmittance at 550 nm wavelength were obtained without intentional substrate heating. |
| 저자 |
김대일, 정철우, 신창호
|
| 소속 |
울산대 |
| 키워드 |
Resistivity; Optical transmittance; TiON; Au; Sputter
|
| E-Mail |
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