| 학회 | 한국재료학회 |
| 학술대회 | 2010년 봄 (05/13 ~ 05/14, 삼척 팰리스 호텔) |
| 권호 | 16권 1호 |
| 발표분야 | G. Display (LCD, PDP, OLED) Materials(디스플레이 재료) |
| 제목 | Properties of post deposition vacuum annealed Au intermediate ITO films |
| 초록 | Transparent Sn-doped In2O3 (ITO) single-layer and ITO/Au/ITO multilayer films were deposited on glass substrate by reactive magnetron sputtering to compare morphology, optical and electrical properties of the films and were then annealed in a vacuum of 1x10-2 Pa at various temperatures from 150 to 450℃ to determine the influence of annealing temperature on the properties of the films. Post-deposition annealing of ITO/Au/ITO films lead to considerably lower electrical resistivity, higher optical transparency, and crystallization of the films. A sheet resistance of 8 Ω/□ and an optical transmittance of 82% at 550 nm wavelength were obtained from the ITO/Au/ITO films annealed at 450℃. In the X-ray diffraction pattern, as-deposited ITO films did not show any diffraction peak, while as-deposited ITO/Au/ITO films have crystal planes. When the annealing temperature reached the 150-450℃ range, both diffraction peak intensities increased significantly. |
| 저자 | 정철우, 신창호, 김대일 |
| 소속 | 울산대 |
| 키워드 | ITO; Au; Resistance; Optical transmittacne |
