| 학회 |
한국공업화학회 |
| 학술대회 |
2008년 가을 (11/12 ~ 11/14, ICC 제주) |
| 권호 |
12권 2호 |
| 발표분야 |
고분자 |
| 제목 |
Ion beam micropatterning of polymer thin films using a 300-keV ion implanter |
| 초록 |
Micropatterning of polymers by ion irradiation was demonstrated in this study. Various polymer thin films spin-coated on Si wafers were irradiated with proton ions through a pattern mask in a contact mode under various conditions. The irradiated films were baked and developed to generate polymer patterns. Well-defined 40 μm negative-type patterns were obtained using a 300-keV ion implanter. In the case of PMMA, both positive and negative patterns could be obtained by controlling the ion fluence. |
| 저자 |
이병민1, 정찬희1, 황인태1, 안미영1, 이정수1, 홍성권2, 허강무2, 노영창1, 최재학1
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| 소속 |
1한국원자력(연), 2충남대 |
| 키워드 |
Ion irradiation; Micropatterning; Polymer thin films; Ion implanter; Ion Fluence
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| E-Mail |
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