| 학회 |
한국재료학회 |
| 학술대회 |
2012년 가을 (11/07 ~ 11/09, 라카이샌드파인 리조트) |
| 권호 |
18권 2호 |
| 발표분야 |
A. 전자/반도체 재료(Electronic and Semiconductor Materials) |
| 제목 |
Effect of TaNx on the electrical and optical properties of annealed TaNx/Ag/TaNx films |
| 초록 |
The as deposited Ag(10 nm)/glass films exhibited agglomerated nano-crystals with seemingly thick boundaries. After introducing the TaNx interlayer the Ag films shows dense and smooth structure. The auger electron spectroscopy results indicate that the TaNx is effective barrier restraining the diffusion of Ag in TaNx(10 nm)/Ag(10 nm)/TaNx(10 nm)/glass films. After annealing (up to 300 oC), no outward diffusion of Ag through TaNx is observed in TaNx(10 nm)/Ag(10 nm)/TaNx(10 nm)/glass films. In addition, the outermost layer TaNx is partially oxidized into Ta2O5. Consequently, film shows a promising optical properties with 73% of visible transmittance and ~15% average transmittance in near infrared region. The present obtained optical data was good agreement with the simulated spectra. |
| 저자 |
Chadrasekhar Loka, 유호탁, 이기선
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| 소속 |
공주대 |
| 키워드 |
sputtering; multilayers; interface diffusion; optical emissivity
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| E-Mail |
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