| 초록 |
In this study, we demonstrated the capability of the poly (dimethyl siloxane), PDMS-based anti-adhesion surface treatment strategy for high resolution unconventional lithography using hard or soft molds as representatives of imprint lithography or soft lithography, respectively. In unconventional lithography, the adhesion release between mold and polymer patterns is affected by surface energy, storage and loss moduli, etc. Although perfluoro-groups have very low surface energy, the adhesion force, represented by peel fracture energy, of an intrinsic PDMS surface is lower than that of a surface treated with perfluoro-groups. For these reasons, we used a PDMS thin layer as an anti-adhesion release layer. Also, owing to this property, PDMS thin layer can be applied to a super-hydrophobic coating material. In the present study, we introduce a simple fabrication technique to highly transparent super-hydrophobic surface with a PDMS-coated flexible mold. |
