| 학회 |
한국재료학회 |
| 학술대회 |
2012년 봄 (05/17 ~ 05/18, 무주덕유산리조트) |
| 권호 |
18권 1호 |
| 발표분야 |
A. 전자/반도체 재료(Electronic and Semiconductor Materials) |
| 제목 |
Dielectric and Piezoelectric Properties of Pb(Zr,Ti)O3 Film constrained with Different Stress |
| 초록 |
Piezoelectric films are useful for a wide range of sensor, energy harvester and actuator applications. To achieve the high performance, high piezoelectric coefficient is crucial for this material. In this report, we fabricated the PZT thick film using the aerosol deposition method on Si/Sapphire/YSZ substrates, which have the different thermal expansion coefficient with PZT film itself. During the annealing process for increase of crystallinity in nano-size PZT grain, the mismatch of thermal expansion coefficient between PZT film and substrates induced the different level of strain even with different directions. The different stress affects piezoelectric and dielectric properties. Especially, constrained PZT film enhanced the phase transition temperature higher. |
| 저자 |
이정근1, 이수환1, 이종필2, 공영민3, 류정호4, 박동수4, 정대용1
|
| 소속 |
1인하대, 2명지대, 3울산대, 4KIMS |
| 키워드 |
Piezoelectric; PZT; Stress
|
| E-Mail |
|
