| 초록 |
The removal of sub-micron sized contaminant particle from surfaces formed on display panel is one of the important issues in manufacture industry. The particle beam technique is an effecive in successful fabrication of nano-scale devices. The particle beam uses nanometer-sized bullet particle moving at supersonic velocity. CO2 bullet were generated by gas-phase nucleation and growth. In this research, the removal of sub-micron metal and Al2O3 particles from glass panels was performed. Results show that all contaminant particles were completely removed from a variety of surface in a few second. Reducing the size and increasing the velocity of the bullet particles can improve the effectiveness of contaminant removal from thin film. |
