| 초록 |
This study aimed to investigate properties of low energy ion beam modification, with an ion energy less than 200eV, on polymer films and wafers. The argon and oxygen ion beam current density with the discharge voltage of 250V was measured approximately 0.3 mA/cm² and 0.2 mA/cm², respectively, showing the upward trend with the discharge voltage. The surface energy of modified specimens, which was quantified measuring the contact angle of the specimens, increased to 80mN/m, double that of untreated specimens. |
