| 학회 |
한국화학공학회 |
| 학술대회 |
2008년 봄 (04/23 ~ 04/25, 제주ICC) |
| 권호 |
14권 1호, p.651 |
| 발표분야 |
에너지/환경 |
| 제목 |
A Proposed Method on Determination of Destruction and Removal Efficiency (DRE) for Perfluorocompounds (PFCs) by Gas Scrubbers |
| 초록 |
Recently, the information technology (IT) industries have attempted to lower the emissions of perfluorocompounds (PFCs), greenhouse gases under the global regulation on the climate change. Total amount of PFC emission is calculated from the flow rate and the partial pressures of PFCs. For the precise measurement of PFC emission amount, the mass flow controlled helium gas is continuously added into a scrubber, as an emission control technology, of which destruction and removal efficiency (DRE) is being measured. The partial pressures of PFCs and helium can be accurately measured using a mass spectrometer in each sample extracted from inlet and outlet of the scrubber system. The flow rates are calculated from the partial pressures of helium and also, PFC DRE of the scrubber is calculated from the partial pressure of PFC and the flow rate. Using this method, the relative expanded uncertainties of the flow rate and the partial pressures of PFCs are ± 2 % (k=2) in case the concentrations of NF3 and SF6 are as low as 100 µmol/mol. |
| 저자 |
강남구, 이진복, 문동민, 이정순, 김광섭, 김진석
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| 소속 |
한국표준과학(연) |
| 키워드 |
scrubber; destruction and removal efficiency (DRE); perfluorocompounds (PFCs)
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| E-Mail |
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| 원문파일 |
초록 보기 |
