| 초록 |
In recent years, ferroelectric ceramics which have high polarization and dielectric constants are promising in developing of electronic devices such as piezoelectric products, sensors, actuators, and devices for energy harvesting. Lead zirconate titanate (PZT) which is the best example of ferroelectric material has been investigated widely for applications to low permittivity and dielectric loss with piezoelectric properties. However, its large hysteresis loop, high remnant polarization, and low dielectric breakdown strength are not satisfied for feasibility of a high recoverable energy density in dielectric capacitors. In this study, we fabricated Pb0.97La0.02(Zr0.5Sn0.44Ti0.06)O3 (PLZST) antiferroelectric (AFE) thick films with a 5~6μm by aerosol deposition (AD) at room temperature, followed by post-annealing for enhancing crystallinity. Through the AD process, primary material composition and crystal structure are matained in the deposited films without visible pores and with good adhesion to the substrate by avoiding the chemical reactions occurring in high-temperature thermal processing. We can fabricate dense thick films which have artificially engineered relaxor ferroelectric behavior with nano-grains through the collision of fine ceramic powder particles on substrate by using AD. This study suggests that Pb0.97La0.02(Zr0.5Sn0.44Ti0.06)O3 (PLZST) shows high energy storage density and efficiency by AD method and it can be effective for high energy storage devices. |
