화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2003년 봄 (04/25 ~ 04/26, 순천대학교)
권호 9권 1호, p.987
발표분야 재료
제목 Ultrahigh Density CoCrPt Magnetic Media Patterned From Block Copolymer Templates
초록 Here, we report a novel fabrication method of the patterned media of CoCrPt alloy with densities as high as 650 Gbit/in2 via spherical holes of an ordered block copolymer (PS-b-PMMA) film. The present method created recording density three times as high as the recently reported procedure using focused-ion-beam lithography. The coercivity of the isolated CoCrPt dots made by the self-assembled block copolymer was considerably higher than that of the continuous magnetic media. Acknowledgement: This work was supported by a grant(M102KN010001-02K1401-00212) from Center for Nanoscale Mechatronics & Manufacturing of 21st Century Frontier Research Program.
저자 최대근1, 양승만1, 정희태1, 권기영1, 정종률2, 신성철2
소속 1한국과학기술원 생명화학공학과, 2한국과학기술원 물리학과
키워드 Magnetic Metal Alloy Dots; Nanopattering; Block Copolyer Templates; Reactive Ion Etching
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