| 학회 |
한국고분자학회 |
| 학술대회 |
2013년 봄 (04/11 ~ 04/12, 대전컨벤션센터) |
| 권호 |
38권 1호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
Highly Ordered Freestanding Titanium Oxide Nanotube Arrays Using Si-Containing Block Copolymer Lithography and Atomic Layer Deposition |
| 초록 |
Highly ordered freestanding TiO2 nanotube arrays with atomic layer control of wall thickness were fabricated using an organic-inorganic hybrid nanoporous template and atomic layer deposition (ALD). The hybrid nanoporous template with a high-aspect-ratio cylindrical nanopore array can be readily fabricated by pattern transfer from a thin silicon-containing block copolymer film into a thick crosslinked organic polymer layer. The template exhibited excellent thermal stability and thus allowed the high-temperature ALD process to conformally deposit TiO2 thin films on the inner surface of cylindrical nanopores. The ultrafine thickness tunability of the ALD process made it possible to develop TiO2 nanotubes with various wall thicknesses. After the template was removed using a dry etch followed by calcination, vertically aligned and highly crystalline anatase TiO2 nanotube arrays were produced without collapse or bundling. |
| 저자 |
조경천1, 정경옥1, 박창홍1, 권세훈2, 김진백1
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| 소속 |
1한국과학기술원, 2부산대 |
| 키워드 |
Titanium Oxide; Nanotube; Block Copolymer Lithography; Atomic Layer Deposition
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| E-Mail |
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