| 초록 |
In this work, the influence of fluorination on surface and dielectric characteristics of polyimide film are studied in X-ray photoelectron spectroscopy (XPS) and dielectric constant, respectively. And, their thermal and mechanical properties of the polyimide film are characterized by thermo -gravimetric analysis (TGA) and tensile strengths, respectively. As experimental results, the fluorine contents of the polyimide film are increased as a function of the treatment gas amount, resulting in decreasing the dielectric constant of the film. The results can be explained that the replacement of fluorine leads to a decrease of the local electron polarization of polyimide, or to an increase of the free volume, which can be attributed to the relatively large volume of fluorine. Nevertheless, the fluorination film doesn’t significantly affect the thermal or mechanical properties of the polyimide film in a mild condition in this system. |
