| 초록 |
The novel high-k composite films of organic-inorganic hybrid materials were prepared by non-hydroytic sol-gel processing. To this end, organic-inorganic hybrid materials with high electronic polarizability are prepared as a matrix materials and it forms a covalently crosslinking reaction. Through sol-gel processing, a high degree of dispersion of the dielectric harfnium moieties was achieved. It quite improves the dielectric properties of the hybrid composite film. The great mechanical integrity, as evidenced by its flexibility, toughness and adhesion, which was significantly tailored to gratify the needs of specific electronic applications. |
