| 학회 |
한국고분자학회 |
| 학술대회 |
2015년 가을 (10/06 ~ 10/08, 대구컨벤션센터(EXCO)) |
| 권호 |
40권 2호 |
| 발표분야 |
대학원생 구두발표 (발표15분) |
| 제목 |
Superior volatile organic compound (VOC) sensing performance of high resolution p-type metal oxide nanowire array |
| 초록 |
The demand for early detecting systems of sub ppm level volatile organic compounds (VOCs) is drastically increasing in the health care and environmental markets. Among the various methods, the chemiresistors based on metal oxide (MOX) have proven to be promising due to their cost efficiency and flexibility in production. Despite consider progress in these area, p-type MOX nanostructure which show various promising potential for practical applications is still in the early stages of development. Here, we show that fabrication of versatile p-type MOX (CuO, NiO, Cr2O3) nanowire array consists of 5nm below nanoparticles with simple lithographic technique. Due to high volume-to-surface area ratio of nanowire, highly sensitive VOCs sensing performance is shown. More important is that versatile transition metal can be patterned and converted to semiconducting oxide with single universal process, accordingly, multi-channel devices can be simply fabricated by only varying the metal sources. |
| 저자 |
정희태1, 김종선1, 전환진2, 정우빈3, 유해욱1, 조수연1
|
| 소속 |
1한국과학기술원, 2Samsung Electronics, 3Semiconductor R&D Center |
| 키워드 |
p-type metal oxide; nano pattern; lithography; volatile organic compound; gas sensor
|
| E-Mail |
|
