초록 |
Microlens have wide applications in consumer products, such as flat panel displays, digital optical processors, image systems, optical communication. This paper describes a effective method for fabrication of microlens array with controlled surface profiles, using a novel method. The silicon master of micro-cylinder array is prepared using photolithography and the film (PC, polycarbonate) is used to fabricate the plastic microlens array. Using the method, microlens arrays having near spherical curvatures have been successful fabricated. Three processing parameters such as the processing temperature, pressure and time, were varied to study the effects of processing conditions on surface profile of microlens. |