| 학회 |
한국화학공학회 |
| 학술대회 |
2014년 가을 (10/22 ~ 10/24, 대전 DCC) |
| 권호 |
20권 2호, p.1973 |
| 발표분야 |
재료 |
| 제목 |
Cost-effective fabrication route of nanowire field effect transistor toward chemical and biological sensors |
| 초록 |
Nanowire field effect transistors (NWFETs) have attracted strong research interests as one of the most outstanding platforms in the field of chemical and biological sensors. Although these techniques have made valuable contributions to the related research fields, their use on a large scale still remains a significant challenge due to their high cost or low throughput. To address these issues in this work, metal oxide NWFETs were fabricated by a cost-effective top-down technique that consists of sequential processes of metal oxide deposition, nanoimprint lithography and low-damage dry etching. Based on the optimized device fabrication route, it is demonstrated that the NWFETs developed in this work can be applied directly to real-time detections of chemical and biological species. Finally, various aspects in terms of chemical and biological sensing behaviors were compared to the conventional bottom-up based NWFETs with high performance. |
| 저자 |
유찬석1, 김진태1, 송정근1, 정희춘1, 이수한2, 최대근2, 임연호1
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| 소속 |
1전북대, 2한국기계(연) |
| 키워드 |
Bio sensor; ZnO/PAC nanowire
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| E-Mail |
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| 원문파일 |
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